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5.3.5.2 Fabrication of Emitter for Field Emission One piece of Si substrate is attached with double-side Kapton tape on the ZnO NW side as the spacer, confining a 1 cm ×1 cm effective area. The other piece of Si substrate is attached with the ZnO NW side facing inside. The back sides of Si substrates are coated with silver paste and connected out as electrodes. To remove possible gases from the tape, the samples were left in the ultra-high vacuum for more than one day before measurements. 5.3.5.3 Fabrication of FS-TENG The Teflon (FEP) film is firstly deposited with Cu film using PVD 75 system. A narrow tape is used as the mask to separate the deposited area into two parts as electrodes, each with area of 8.5 cm ×10 cm. The Cu side of this Teflon film is attached on an acrylic board as the stator. Two sliders are fabricated by attaching nylon films on PU foams and acrylic boards, with areas of 8 cm × 8 cm and 9.5 cm × 10 cm. The materials are all purchased from McMasters 5.3.5.4 Characterization Methods The motions in most of experiments are triggered by hands, except the VOC and QSC tests are conducted through a linear motor. The electrical measurements are mostly conducted by Keithley 6514 electrometers, except the ~pA level current in Figure 5 is measured by a Keithley 4200 electrometer system. The commercial HV source is 3B Scientific U33000-230 DC Power Supply (0-500 V) purchased from Amazon. The CRT is 3B Scientific U8481350 Training Oscilloscope purchased from Amazon, with the function wave generator disconnected from the circuits to avoid consumption of charges. 159PDF Image | HIGH PERFORMANCE TRIBOELECTRIC NANOGENERATOR AND ITS APPLICATIONS
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