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US 2020/0051709Al Feb.13,2020 HIGHLY CONDUCTING AND TRANSPARENT FILM AND PROCESS FOR PRODUCING SAME CROSSREFERENCE TORELATED APPLICATIONS [0001] ThepresentaplicationisacontinuationofU.S. patentaplicationSer.No.13/815,316filedFeb.21,2013, thecontentsofwhichareherebyincorporatedbyreference foralpurposes. FIELD [02] Thepresentdisclosurerelatesgeneralytothefield oftransparentconductiveelectrodesforsolarcel,photo detector,light-emiting diode,touch scren,and display deviceaplicationsand,moreparticularly,toapristine graphene-basedhybridfilmwithacombinationofexcep tionalopticaltransparencyandhighelectricalconductivity (orlow shetresistance). BACKGROUND [0003] Thefolowingreferencesarerelatedtotheartof "transparentandconductiveelectrodes": [0004] 1.Hu,L.;Hecht,D.S.;Gruner,G.“Percolationin [013] 10.Hu;LiangbingandGruner;George;“Touch ScrenDevicesEmployingNanostructureNetwork,”US PatentPub.No.2008/0048996 (Feb.28,2008). [0014] 1.Gruner;George;Hu;Liangbing;andHecht; David;“GrapheneFilmasTransparentandElectricaly ConductiveMaterial,”USPatentPub.No.2009/0017211 (Jan.15,2009). [015] 12.Eda,G.;Fanchini,G.;Chowala,M.“Large AreaUltrathinFilmsofReducedGrapheneOxideasa TransparentandFlexibleElectronicMaterial.Nat.Nano technol.2008,3,270-274. [016] 13.Wang,Xuan;Zhi,Linjie;Mulen,K.“Trans parent,ConductiveGrapheneElectrodesforDye-Sensi tizedSolarCels.NanoLet.2008,8,323. [0017] 14.Wu,J.B.;Agrawal,M.;Beceril,H.A.;Bao,Z. N.;Liu,Z.F.;Chen,Y.S.;Peumans,P.“OrganicLight EmitingDiodesonSolution-ProcesedGrapheneTrans parentElectrodes,”ACSNano209,4,43-48. [0018] 15.De,S.;Coleman,J.N.“AreThereFundamental LimitationsontheShetResistanceandTransparenceof ThinGrapheneFilms?”ACSNano,2010May25;4(5), pp.2713-20. [019] 16.Kim,K.S.;Zhao,Y.;Jang,H.;Le,S.Y;Kim, J.M.;Kim,K.S.;Ahn,J.-H;Kim,P;Choi,J.-Y.;Hong, B.H.“Large-ScalePaternGrowthofGrapheneFilmsfor TransparentandConductingCarbonNanotubeNet StretchableTransparentElectrodes,”Nature,2009,457, works,”Nano Let.204,4,2513-2517. 706-710. no.5688p.1273-1276.DOI:10.126/science.101243. S.“TransferofLarge-AreaGrapheneFilmsforHigh [06]3.Hong-GyuPark,Min-JiLe,KunnyunKimand PerformanceTransparentConductiveElectrodes,”Nano Dae-ShikSeo,“TransparentConductiveSingleWalCar Let.2009,9,4359-4363. [07] 4.Jung-YongLe,StephenT.Connor,YiCui,and Few-LayerGrapheneFilmsonArbitrarySubstratesby Peter Peumans,“Solution-Procesed Metal Nanowire ChemicalVaporDeposition,”NanoLet.2009,9,30-35. MeshTransparentElectrodes,”NanoLet.,208,8(2),p [0022]19.SukangBae,HyeongkeunKim,YoungbinLe, [0005] 2.ZhuangchunWu,etal.“Transparent,Conductive [020] 17.Li,X.S.;Zhu,Y.W.;Cai,W.W.;Borysiak,M.; CarbonNanotubeFilms,”Science27Aug.204:Vol.305 Han,B.Y.;Chen,D.;Piner,R.D.;Colombo,L.;Ruoff,R. bonNanotubeNetworkFilmsforLiquidCrystalDis [0021] 18.Reina,A.;Jia,X.T.;Ho,J.;Nezich,D.;Son,H. plays,ECSSolidStateLet.2Oct.2012:R31-R33. B.;Bulovic,V.;Dreselhaus,M.S.;Kong,J.“LargeArea, 689-692. [08] 5.De,S.;Higins,T.M.;Lyons,P.E.;Doherty,E. Balakrishnan,TianLei,HyeRiKim,YoungIlSong, M .;Nirmalraj,P.N.;Blau,W. J.;Boland,J.J.;Coleman, ing-Jin Kim ,Kwang S.Kim ,Barbaros O" zyilmaz, J.N.“SilverNanowireNetworksasFlexible,Transparent, Jong-HyunAhn,ByungHeeHong,andSumiolijima, Conducting Films:Extremely High DC to OpticalCon “Rol-to-rolproductionof30-inchgraphenefilmsfor ductivityRatios,”ACSNano,2009,3,1767-174. [09]6.Ting-GangChen,Bo-YuHuang,Hsiao-WeiLiu, August2010,574-578. Yang-YueHuang,Huai-TePan,Hsin-FeiMeng,and [0023]20.Tung,V.C.;Chen,L.M.;Alen,M.J.;Wasei, PeichenYu,“FlexibleSilverNanowireMeshesforHigh J.K.;Nelson,K.;Kaner,R.B.;Yang,Y.Low-Tempera EficiencyMicrotexturedOrganic-SiliconHybridPhoto voltaics,”ACS ApliedMaterials & Interfaces,2012,4 HybridMaterialsforHigh-PerformanceTransparentCon (12),6857-6864. ductors.Nano Let.2009,9,1949-195. tureSolutionProcesingofGraphene-CarbonNanotube [010]7.TaegeonKim,AliCanlier,GeunHongKim, [0024]21.I.N.Kholmanov,etal.“ImprovedElectrical JaehoChoi,MinkyuPark,andSeungMinHan,“Elec trostaticSprayDepositionofHighlyTransparentSilver NanowireElectrodeonFlexibleSubstrate,ACSApl. [025]Opticalytransparentandelectricalyconductive Mater.Interfaces,ArticleASAP;DOI:10.1021/ electrodesarewidelyimplementedinoptoelectronic am3023543. devices,suchasphotovoltaic(PV)orsolarcels,light [01]8.YumiAhn,YoungjunJeong,andYounguLee, emitingdiodes,organicphoto-detectors,andvariousdis “ImprovedThermalOxidationStabilityofSolution-Pro cesableSilverNanowireTransparentElectrodeby materialsmustexhibitbothexceptionalyhighopticaltrans ReducedGrapheneOxide,”ACSApliedMaterials& mitanceandlowshetresistance(orhighelectricalcon Interfaces,2012,4(12),6410-6414. ductivity).Morecommonlyusedtransparentandconductive [0012]9.Gruner;George;Hu;Liangbing;andHecht; oxides(TCO)fortheelectrodesinthesedevicesinclude(a) David;“GrapheneFilmasTransparentandElectricaly indiumtinoxide(ITO),whichisusedfororganicsolarcels ConductiveMaterial,”USPatentPub.No.2007/0284557 andlight-emitingdiodes,and(b)Al-dopedZnO,whichis (Dec.13,2007). usedinamorphoussolarcels.Therearesomealternativesto Xiangfan Xu,Jae-Sung Park,YiZheng,Jayakumar transparentelectrodes,”NatureNanotechnology,Vol.5, ConductivityofGrapheneFilmsIntegratedwithMetal Nanowires,”NanoLeters,2012,12(1),pp5679-5683. playdevices.Foruseintheseaplications,theelectrodePDF Image | HIGHLY CONDUCTING AND TRANSPARENT FILM AND PROCESS
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