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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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Table Page LIST OF TABLES 3.1: Table of adhesion energy for untreated and poly(acrylic acid) treated samples .......66 4.1: Table of reaction conditions for experiments CoPt1 – CoPt15 .................................90 4.2: Table of reaction conditions for each deposition, including subsequent depositions on the same sample, for samples TaN 01 – TaN 13 and samples C01 – C18 .........96 4.3: Qualitative results of electrical testing to determine catalytic activity of samples C03, C06 – C10.....................................................................................................103 4.4: Table of reaction conditions for samples BT1 – BT6..............................................109 4.5: Melting points and decomposition points for precursors used in Nd/Ni co- depositions experiments........................................................................................116 4.6: Reaction conditions for Ru/TiO2/Ru multi-layer stack fabrication .........................123 4.7: Reaction conditions for Ru/ HfO2/Ru multi-layer stack fabrication.........................123 4.8: Thickness and Capacitance Data for Ru/HfO2/Ru Sample Stacks ...........................127 xv

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