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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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4.11: XPS sputter depth profile of sample TaN11 showing a 1:1::Ce:Pt ratio at the surface of the TaN surface. Deposited in a hot wall reaction vessel via SFD at 150 oC ..................................................................................................................97 4.12: XRD pattern that confirms the presence of Ce and Pt on sample TaN11. The Ce peaks correspond to Ce2O3, <102> and <212> while the platinum peaks correspond to <200>. Ce and Pt deposited in a hot wall reaction vessel via SFD at 150 oC ..............................................................................................................98 4.13: FE-SEM image at low magnification showing Ce/Pt deposited on a carbon matrix, sample C08. Ce/Pt deposited via two separate SFD reactions. The first reaction is a deposition with platinum precursor only in a hot wall reaction vessel at 150 oC. The second is deposition of both Ce and Pt precursors in a hot wall reaction vessel at 150 oC..................................................................................................100 4.14: FE-SEM image showing Ce/Pt deposited on a carbon matrix, sample C08. Particle sizes range from 100 – 500 nm. Ce/Pt deposited via two separate SFD reactions. The first reaction is a deposition with platinum precursor only in a hot wall reaction vessel at 150 oC. The second is deposition with both Ce and Pt precursors in a hot wall reaction vessel at 150 oC .............................................100 4.15: XPS spectra of the Ce 3d finger print region (top left) and Pt 4f finger print region (top right) confirming the presence of both Ce and Pt in sample C09. XPS sputter depth profile (bottom) showing that the Ce and Pt are dispersed throughout the entire thickness of the carbon substrate. Ce/Pt deposited via two separate SFD reactions. The first reaction is a deposition of ceria only in a cold wall reaction vessel at 300 oC. The second is deposition of both Ce and Pt in a hot wall reaction vessel at 150 oC......................................................................101 4.16: XRD comparison of samples C14 – C18. All samples show polycrystalline platinum peaks and indicate that ceria is also polycrystalline in the +3 state (Ce2O3) ..............................................................................................................102 4.17: Chemical structure of barium isopropoxide, Baip, and titanium (IV) isopropoxide, Ttip ....................................................................................................................106 4.18: XPS spectra of Ba 3d (left) and Ti 2p (right) finger print regions of sample BT5. Ba is present, however Ti is not. Deposited from supercritical H2O/EtOH at 290 oC with a 0.01 M propoxide concentration and a H2O/Ti molar ratio of 500 ..110 4.19: XPS spectra of O 1s (left) and C 1s (right) finger print regions of sample BT6. Both C and O are present in high concentration confirming the formation of BaCO3. Deposited from supercritical H2O/EtOH at 290 oC with a 0.01 M propoxide concentration and a H2O/Ti molar ratio of 100...............................110 xx

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