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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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5.2: Schematic representation of the PRESS system – second design........................145 5.3: Schematic representation of the PRESS system – final design ...........................146 5.4: Chemical structure of titanium (di-isopropoxide) bis(acetylacetonate), tris(2,2,6,6- tetramethyl-3-5-heptanedionato) aluminum, Al(tmhd)3, titanium(IV) 2- ethylhexoxide and zinc 2-ethylhexanoate .........................................................148 5.5: FE-SEM top-down (top) and cross sectional (bottom) of 10 vol. % Ttip PRESS sample. No order is observed ...........................................................................151 5.6: FE-SEM top-down (top) and cross sectional (bottom left and right) of 25 vol. % Ttip PRESS sample. A highly porous dendritic, with cylindrical macro scale, titania coating, consisting of agglomerated sub 100 nm titania crystals, is deposited ............................................................................................................152 5.7: FE-SEM top-down (top) and cross sectional (bottom left and right) of 75 vol. % Ttip PRESS sample. A highly porous dendritic, with cylindrical macro scale, titania coating, consisting of agglomerated sub 100 nm titania crystals, is deposited ............................................................................................................153 5.8: FE-SEM top-down (top) and cross sectional (bottom) of 100 vol. % Ttip (no CO2) PRESS control sample. No order is observed ..................................................154 5.9: XRD of 75 vol. % Ttip PRESS sample. XRD indicates polycrystalline rutile titania is formed.................................................................................................155 5.10: XPS sputter depth profile (top) and survey scan (bottom) of 75 vol. % Ttip PRESS sample. XPS confirms the correct atomic concentration of Ti:O::1:2, with no carbon contamination in the bulk of the film .......................................156 5.11: IR temperature profile of a typical Ttip PRESS deposition. Substrate temperature never exceeds 250 oC.........................................................................................157 5.12: XRD comparison of samples in the acetic acid concentration study. The addition of acetic acid does not significantly alter the crystallinity of the titania film. XRD shows that the films main polymorph is rutile with traces of brookite and anatase titania ....................................................................................................158 5.13: FE-SEM top-down (top) and cross sectional (bottom) of 25 vol. % ZnEO PRESS sample. No order is observed ...........................................................................160 5.14: FE-SEM top-down (top) and cross sectional (bottom) of 50 vol. % Ttip ZnEO sample. A highly porous dendritic zinc oxide nanostructure consisting of columnar assemblies of agglomerated zinc oxide particles of approximately 100 nm in size is deposited.......................................................................................161 xxii

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