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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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Supercritical fluids are sometimes referred to as gas-liquid phase hybrid and employ properties of both phases. The supercritical region can be found above the critical point which is at the end of the two phase line between the gas and liquid regions31, Figure 1.2. 100 90 80 70 60 50 40 30 20 10 0 -110 -90 -70 Supercritical Fluid Solid Liquid Vapor -50 -30 -10 10 30 50 Figure 1.2: Phase diagram of carbon dioxide which includes the supercritical region. Supercritical fluids behave like gases in that they have favorable transport properties. These include low viscosity, which allows for fast mass transport within the reactor, and zero surface tension32, Figure 1.3, which allows for deposition in confined geometries. 11

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