Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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Figure 1.4: Density plot as a function of pressure for carbon dioxide at temperatures between 40 oC – 150 oC. 1.5 Instruments and Techniques 1.5.1 Scanning Electron Microscope Imaging at the nano scale is done using a Semi – In – Lens Field Emission – Scanning Electron Microscope (JEOL USA Inc. and JEOL LTD.), model JSM-6320FXV. The software used to operate the instrument and handle images is the JEOL Orion software package, version 1.72.01. Typical SEM settings are: probe beam current = 3 – 5 μA, accelerator voltage = 5 or 10 kV, emissions = 8 μA. The working distance is set to either 2 or 3 mm, depending on sample. Both Au and Pt coatings are used to increase conductance and thereby increasing image resolution. Au coatings are applied using a Cressington Sputter Coater 108, model 6002, (Ted Pella, Inc.). Typically, the current is set to 35 mA and is coated for 45 13

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