Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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seconds. Pt coatings are applied using a High Resolution Ion Beam Coater, model 681, (GATAN Inc.). Beam energy is set to 9 keV and results in a growth of 1 nm/min. 1.5.2 Atomic Force Microscope Atomic force microscopy (AFM) is carried out using a Dimension 3100 atomic force microscope (Digital Instruments, a subsidiary of Veeco Instruments, Inc.). The AFM is interfaced with a NanoScope IIIa controller. Both tapping and contact modes are used. The software used is Nanoscope (R ) IIIa, version 5.12r3. The tips used for the microscope are Veeco, model RTESPW, 1 – 10 Ω-cm N doped Si. Tip specifications: T = 3.5 – 4.5 μm, L = 115 – 135 μm, W = 30 – 40 μm, f° = 312 – 342 kHz and k = 20 – 80 N/m. 1.5.3 X-ray Photoelectron Spectroscopy A Quantum 2000 Scanning ESCA Microprobe (Physical Electronics USA) is used to perform X-ray photoelectron spectroscopy (XPS) using a monochromatic Al Kα X-ray source (1486.6 eV) and is equipped with an Ar+ ion-sputtering gun. Typical x-ray settings used are 15 kV, 25 W, with 100 μm beam size. The take off angle is 45° and the ion gun sputtering settings are 500 V, 700 nA, and a 0.5 x 0.5 mm square crater. XPS raw data is analyzed using Multipak, version 6.1A (Physical Electronics USA). 1.5.4 Nuclear Magnetic Resonance Species are analyzed using nuclear magnetic resonance in order to determine unknown species as well as confirming results. An Advance spectrometer (Bruker Instruments) is used with a Bruker 400 Ultrashield Magnet. Interfacing with the 14

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