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instrument is done by using the NMR Suite, version 3.5 patch level 6 (Bruker Biospin GmbH). Collection of data and processing is done with XWIN-NMR, version 3.5 (Bruker Biospin GmbH) and post experimental analysis is done with XWIN-Plot Editor, version 3.5-pl2 (Bruker Biospin GmbH) and MestReC, version 4.8.6.0 (MestReLab Research). 1.5.5 X-ray Diffraction The crystalline structure of samples is analyzed using a Phillips X’Pert PW 3040 with a Cu Kα radiation source. Films are analyzed using X’Pert Highscore and Viewer. 1.5.6 Ultraviolet-Visible Spectroscopy An Agilent 8453 Spectrophotometer (Agilent Technologies) is used to perform ultraviolet and visible spectroscopy of samples. A standard deuterium lamp and tungsten lamp are calibrated and used as received from Agilent Technologies. Samples are analyzed in a standard optical glass cuvette (3.0 mL total volume, 10 mm pathlength and 10 mm pathwidth) and seated in a standard cell holder. The instrument is interfaced with an HP Vectra VLi 8SF (Hewlett Packard) system. Raw data is analyzed using Agilent UV-visible Chemstation software (Agilent Technologies), version A.08.03 [71]. 1.6 References (1) International Technology Roadmap for Semiconductors, http://www.itrs.net/, 2007 (2) G. E. Moore, Electronics 1965, 38, 114-117. (3) Moore's Law, www.intel.com, 2008 (4) T. T. Kodas, The Chemistry of Metal CVD, John Wiley & Sons Ltd, 1994. 15PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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