PDF Publication Title:
Text from PDF Page: 044
process and thus confirmation that SFD provides access to growth kinetics that are zero order in precursor concentration. Recently, Zong, et al., reported the kinetics and reaction mechanism of copper SFD via the hydrogen assisted reduction of bis(2,2,7- trimethyloctane-3,5-dionato)copper(II), Cu(tmod)2, and proposed a Langmuir- Hinshelwood rate expression for the reaction.46 This was the first time the kinetics of an SFD process was studied. Cu SFD using this precursor was found to be mechanistically similar to the CVD process and was modeled accordingly. However, Zong found that unlike in CVD, the high precursor concentration accessible in SFD yielded surface reaction rate limited, zero-order deposition kinetics with respect to precursor over broad ranges of precursor concentrations. Here is presented a comprehensive study of ruthenium SFD kinetics via the hydrogen assisted reduction of bis(2,2,6,6-tetramethyl- heptane-3,5-dionato)(1,5-cyclooctadiene)ruthenium(II), Ru(tmhd)2cod and find similar results for access to zero order deposition rates at elevated precursor concentrations that are presumably surface-reaction rate limited. 2.2 Experimental 2.2.1 Equipment 2.2.1.1 Differential Kinetics Cold Wall Batch Reactor The kinetics study is performed in a differential kinetics cold wall batch reactor, Figure 2.1, comprised of two opposed 316 stainless steel flanges sealed with a 2-236 buna-N o-ring. A cylindrical (r = 10 mm) aluminum stage heated by three 1” long, 120 V, 100 W cartridge heaters (Omega Engineering, Inc., Stamford, CT) is used to quickly attain the desired reaction temperature. The wall of the stainless steel reactor is heated 20PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
PDF Search Title:
Supercritical Fluid Deposition Of Thin Metal FilmsOriginal File Name Searched:
Supercritical-Fluid-Deposition-Of-Thin-Metal-Films-Kinetics-Mec.pdfDIY PDF Search: Google It | Yahoo | Bing
Sulfur Deposition on Carbon Nanofibers using Supercritical CO2 Sulfur Deposition on Carbon Nanofibers using Supercritical CO2. Gamma sulfur also known as mother of pearl sulfur and nacreous sulfur... More Info
CO2 Organic Rankine Cycle Experimenter Platform The supercritical CO2 phase change system is both a heat pump and organic rankine cycle which can be used for those purposes and as a supercritical extractor for advanced subcritical and supercritical extraction technology. Uses include producing nanoparticles, precious metal CO2 extraction, lithium battery recycling, and other applications... More Info
| CONTACT TEL: 608-238-6001 Email: greg@infinityturbine.com | RSS | AMP |