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is encased in a high temperature resistant box to maintain a consistent temperature. The valve is heated with a ring type aluminum block heated with a cartridge heater (Omega Engineering Inc., Stamford, CT). Figure 2.2: Microelectronic actuated, six-loop, multi position, high pressure, UW type configuration valco valve for experimental sampling loop system (left) schematic view (right) internal view with sample loops attached. 2.2.1.3 CO2/Water Burette System During the reaction, small samples of known volume are collected via the previously mentioned HPLC sample loop system so that further analysis by UV visible spectroscopy can be used to confirm precursor concentration. The temperature of the samples in the reactor are typically around 150 – 200 oC. Samples are collected from the reactor to an HPLC sample loop over 5 seconds. The sample loops are maintained at 70 oC. Calculations for concentration are based on the 70 oC sample loop temperature. To confirm sufficient time is allowed for the high temperature samples collected from the reactor to equilibrate to the new temperature of the HPLC loop, a water burette system is incorporated into the sampling system. A controlled expansion of the high pressure sample to atmospheric pressure into the water filled burette allows for the back calculation of the temperature of the collected sample. It is found that the temperature of 22PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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