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Figure 2.6: Standard curve for concentration of Ru(tmhd)2cod in n-heptane for UV absorbance of 257 nm (primary) and 305 nm (secondary). Extinction coefficients of the Beer-Lamber law for the primary and secondary absorbances are 18.71 L/g and 9.69 L/g, respectively. The deposited films are characterized in order to obtain their thickness, purity, sheet resistance and roughness. Thickness measurements are performed using a Sloan Dektak3 Surface Profiler. Growth rates are then calculated by dividing film thickness by reaction time. Film purity is determined by x-ray photoelectron spectroscopy (XPS). The film’s sheet resistance is measured with a Jandel four-point probe and Keithley 2000 multimeter. Atomic force microscopy (AFM) is carried out in both tapping and contact mode to gather height and phase data. 27PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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