PDF Publication Title:
Text from PDF Page: 055
Figure 2.9: X-ray photoelectron spectroscopy ruthenium 3d orbital binding energy region of a highly conformal, 83 nm thick ruthenium film deposited by SFD. Reaction conditions: 260 °C, 172 bar, 0.09 wt. % Ru(tmhd)2cod, 0.3 wt. % hydrogen, 3 minute heating. Resistivity measurements are consistent with high film purity. Sheet resistance is calculated from film resistivity and thickness measurements and is determined to be approximately 20 μΩ-cm. While the measured resistance is greater than that of bulk Ru (7.6 μΩ -cm), this is expected due to the thin nature of the film and grain boundary effects. Had significant levels of carbon contamination been present, sheet resistance values would be expected to be much higher. A cross sectional field emission scanning electron microscopy, FESEM, is shown in Figure 2.10 (top down) and Figure 2.11 (cross section). Figure 2.12 is a height image from atomic force microscopy, AFM, analysis. The SEM image indicates that continuous ruthenium films are deposited on the planar silicon substrates, while AFM data indicates 31PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
PDF Search Title:
Supercritical Fluid Deposition Of Thin Metal FilmsOriginal File Name Searched:
Supercritical-Fluid-Deposition-Of-Thin-Metal-Films-Kinetics-Mec.pdfDIY PDF Search: Google It | Yahoo | Bing
Sulfur Deposition on Carbon Nanofibers using Supercritical CO2 Sulfur Deposition on Carbon Nanofibers using Supercritical CO2. Gamma sulfur also known as mother of pearl sulfur and nacreous sulfur... More Info
CO2 Organic Rankine Cycle Experimenter Platform The supercritical CO2 phase change system is both a heat pump and organic rankine cycle which can be used for those purposes and as a supercritical extractor for advanced subcritical and supercritical extraction technology. Uses include producing nanoparticles, precious metal CO2 extraction, lithium battery recycling, and other applications... More Info
| CONTACT TEL: 608-238-6001 Email: greg@infinityturbine.com | RSS | AMP |