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2.3.2 Kinetics 2.3.2.1 Temperature Dependence The Arrhenius equation is used to determine the activation energy for the SFD of ruthenium films deposited by the hydrogen assisted reduction of Ru(tmhd)2cod. The temperature dependence of growth rate is studied over the range of 240 °C to 280 °C in 10 °C steps (Figure 2.13). The experiments are performed at a constant reaction pressure of 172 bar, a precursor concentration of 0.07 wt. % and hydrogen concentration of 0.3 wt. %. The apparent activation energy is found to be 45.3 kJ/mol. In other kinetic studies of interest, Papadatos, et al., found the activation energy for Ru(tmhd)2cod deposition on SiO2 to be 41.3 kJ/mol using a metal organic CVD (MOCVD) process between 400 – 450 oC, 1 torr and oxygen and hydrogen as the reactive gases.54 The same group also found the activation energy for bis(ethylcyclopentadienyl)ruthenium, Ru(EtCp)2, on SiO2 to be 43 kJ/mol using MOCVD between 320 – 360 oC, 0.3 torr and oxygen as the reactive gas.55 Dey, et al., found that the oxygen-assisted pyrolysis of Ru(tmhd)2cod for the deposition of ruthenium on amorphous HfO2, has an activation energy of 136 kJ/mol using a liquid source MOCVD process between 250 – 290 oC.56 34PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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