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Figure 2.17: Example of a foiled ruthenium film due to increased stress in the film. Reaction conditions: 260 °C, 172 bar, 0.09 wt. % Ru(tmhd)2cod, 0.6 wt. % hydrogen, 3 minutes heating. 2.3.2.5 Byproduct Concentration Dependence The reaction decomposition products, 1,5-cyclooctadiene (cod), cyclooctane (cot), and 2,2,6,6-tetramethyl-heptane-3,5-dionato (tmhd), are studied to determine their effects on the growth rate. Each byproduct is tested independently of the others over specified ranges. The reactions are carried out at a constant reaction temperature of 260 °C for 3 minutes, 172 bar, 0.9 wt. % Ru(tmhd)2cod, 0.3 wt. % hydrogen. Plots of the data are shown for tmhd, cod and cot in Figure 2.18, Figure 2.19 and Figure 2.20, respectively. Tmhd and cod concentrations are varied from 0 wt. % to 0.9 wt. % and plots of the data show a negative effect on the growth rate of the films. The differential method of rate analysis was used to determine the reaction order from the inset plot. The slope of 40PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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