Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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coe. These findings indicated a first order hydrogenation with respect to cod at low concentrations and a much lower rate at higher concentrations of cod due to the competition for surface sites, resulting in low hydrogen surface concentrations at higher cod concentrations. Based upon previous CVD and SFD studies as well as observed experimental results, the following reaction sequence is proposed for the deposition of ruthenium from Ru(tmhd)2cod in SCCO2. Ru(tmhd)2cod + 2* ↔ Ru tmhd cod* + tmhd* Ru tmhd cod* + * ↔ Ru cod* + tmhd* Ru tmhd cod* + * ↔ Ru tmhd* + cod* Ru(tmhd)2cod + 2* ↔ Ru (tmhd)2* + cod* Ru (tmhd)2* + * ↔ Ru tmhd* + tmhd* H2 + 2** ↔ 2H** 2H** + cod* ↔ coe* + 2** 2H** + coe* ↔ cot* + 2** cod* ↔ * + cod(g) coe* ↔ * + coe(g) cot* ↔ * + cot(g) Ru tmhd* ↔ Ru(s) + tmhd* Ru cod* ↔ Ru(s) + cod* H** + tmhd* → (tmhd)H* + ** (tmhd)H* ↔ * + (tmhd)H(g) 46 Equation 01 Equation 02 Equation 03 Equation 04 Equation 05 Equation 06 Equation 07 Equation 08 Equation 09 Equation 10 Equation 11 Equation 12 Equation 13 Equation 14 Equation 15

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