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CHAPTER 4 APPLICATIONS OF SUPERCRITICAL FLUID DEPOSITION 4.1 Introduction The use of SFD to deposit a wide variety of highly conformal thin films in high aspect ratio features is demonstrated. However, beyond the ability to deposit single component metals and metal oxides exists the opportunity for more complex applications. The simultaneous deposition of multiple components allows one to form both dispersed multi-elemental films as well as alloys with precise composition control in a single step. Multiple single component depositions allow high purity stacks to be fabricated which is the basis for top-down fabrication in the microelectronics industry. The goal of this chapter is to outline particular areas of interest utilizing the previously mentioned techniques to fabricate devices and build components for a wide variety of applications ranging from nano-sized capacitors to alternative materials for both fuel cell electrodes and energy storage devices. 4.2 Co-depositions and Alloys 4.2.1 Cobalt/Platinum In the area of magnetic recording and storage, the recording media is of paramount importance and is the focus of much research. The media itself can be classified into two types, longitudinal and perpendicular recording media. In longitudinal recording media, information is stored magnetically across the horizontal axis of the media while in perpendicular recording magnetically stores information vertically. 78PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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