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reactor. A known amount of precursor is loaded into the vessel. Reaction conditions are listed in Table 4.1. The vessel is sealed and placed behind protective polycarbonate housing. Then, using a constant flow of nitrogen, the reaction vessel is purged continuously over a 10 minute period. The reactor is then heated to the desired preheating temperature and allowed to equilibrate (t = 10 min.). Carbon dioxide is introduced into the reactor.. The reactor sits at this condition for a set time (t = 60 min.) to allow for dissolution of the precursor into the CO2. Next, hydrogen is loaded into the system using a manifold of known volume (70 mL). The system is maintained at these conditions for a set time. The reactor is then allowed to cool down while fresh CO2 is used to flush multiple reactor volumes through the system to remove reaction byproducts and unreacted precursor. The effluent is passed through an activated carbon bed and silicon oil bubbler before being vented to the atmosphere. The deposited films are characterized in order to obtain their purity, crystallinity and composition. Film purity and composition is determined by XPS (Co20-25, Pt25-36). Crystallinity is determined by XRD. 4.2.1.2 Results and Discussion Results for the co-deposition of cobalt and platinum from various precursors are presented. Both a cold wall and a hot wall reactor are used for the depositions. The temperature ranges used for the hot wall reactor and the cold wall reactor are 40 oC to 150 oC and 60 oC to 300 oC. Pt(Me)2cod is the only platinum precursor used while CoCp2 and Co(tmhd)3 are both used as the cobalt source. Pt(Me)2cod concentration is varied between 0.2 wt. % and 0.5 wt. %. CoCp2 concentration is varied between 0.2 wt. % and 83PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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