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Figure 4.10: Top-down FE-SEM of sample TaN08 showing a conformal coating of Ce and Pt on the TaN capped substrate. Deposited via SFD in a hot wall reaction vessel at 150 oC. Figure 4.11: XPS sputter depth profile of sample TaN11 showing a 1:1::Ce:Pt ratio at the surface of the TaN surface. Deposited in a hot wall reaction vessel via SFD at 150 oC. 97PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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