Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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Figure 4.15: XPS spectra of the Ce 3d finger print region (top left) and Pt 4f finger print region (top right) confirming the presence of both Ce and Pt in sample C09. XPS sputter depth profile (bottom) showing that the Ce and Pt are dispersed throughout the entire thickness of the carbon substrate. Ce/Pt deposited via two separate SFD reactions. The first reaction is a deposition of ceria only in a cold wall reaction vessel at 300 oC. The second is deposition of both Ce and Pt in a hot wall reaction vessel at 150 oC. 101

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