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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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4.2.3 Barium Titanate There exists a need for better energy storage devices given the rise in increasingly power intensive microelectronics devices. Batteries based off of standard lithium ion chemistry have high efficiencies of roughly 80 %. However, the power density is very low, requiring large bulky batteries to power cell phones and laptop computers for short periods of time before a recharge is needed. Additionally, the recharge time for batteries is on the order of hours, which for most electronics renders them unusable while recharging. The total number of recharge cycles is also limited to roughly 1000, limiting most rechargeable lithium ion batteries to a daily usage lifetime of 3 years. An alternative to liquid lithium ion chemistry based batteries is the use of solid ceramics, having a high dielectric constant (k). These solid state alternative energy devices have increased power density and recharge times with as many as 106 recharge cycles. One such solid state ceramic, alternative energy, high k dielectric material is barium strontium titanate (Ba1-xSrxTiO3, BST).56, 57 BaTiO3, BT, was originally studied because it exhibits ferroelectric behavior.58 It has high dielectric permittivity, good thermal stability and a Curie temperature of 120 oC, which makes it an ideal candidate for multi layer ceramic capacitors (MLCCs).59 It was found that with the addition of strontium to the BT material, the Curie temperature could be controllably lowered to room temperature.60-62 The ability to have a room temperature Curie temperature, in conjunction with sub 100 nm particle size, opens up the possibility for a wide range of applications: tunable resonators, filters, phase-shifters, variable-powder dividers and variable-frequency oscillators.63, 64 Unfortunately, the techniques (sol-gel65-67, 104

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