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precipitation68-70, hydrothermal64, 71-74 and mechanochemical75) for fabricating BST powders suffer from a variety of problems, some of which are the need for multiple complex steps, temperatures over 1300 oC needed for processing, large particle size distributions76-78 and secondary phases are formed, such as Ba2TiO4 and Ba6Ti17O10. Current areas of research are focused on simplifying the BT and BST synthesis process. In 1999, Bocquet et al. reported the semi-continuous process for the formation of BT powders using a solvothermal reaction and supercritical treatment.79 This was quickly followed by the first fully continuous synthesis of BT80 and BST81 powders by Aymonier et al. in 2005 and 2006, respectively. It is now of interest to extend this single step continuous synthesis of BT and BST material to the deposition of films in order to pursue thin ceramic film applications. For example, a nano sized capacitors that will have orders of magnitude higher energy density than current capacitors used in the microelectronics industry. 4.2.3.1 Experimental 4.2.3.1.1 Equipment 4.2.3.1.1.1 Reactor The cold wall reactor used is previously described in detail in chapter 3. The aluminum stage was replaced with a stainless steel stage in order to prevent aluminum oxide formation in the highly corrosive H2O/EtOH environment. 105PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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