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4.2.3.2 Results and Discussion Experiments are carried out in order to deposit films of BaTiO3 from supercritical water and ethanol mixtures onto silicon substrates. Ethanol is used in order to dissolve both precursors prior to reaction so that BaTiO3 is formed and not barium carbonate, which is favored when reacting the components individually. The first step in this reaction process is the precursor synthesis. It is important to note that the Baip is very air sensitive, showing color change instantly in the presence of air. The precursor synthesis is by far the most important step and significant attention is required to properly synthesize the precursor solution. The precursor solution is stable for approximately 3 hours after synthesis and therefore must be made prior to each experiment. A new stainless steel heated stage is used for the reactions since the aluminum readily oxidizes to aluminum oxide in the presence of water at the reaction temperatures. For all reactions, the Ba to Ti molar ratio is always 1 to 1. The temperatures used during the reaction are 150 oC, 250 oC and 290 oC. The first temperature, 150 oC, is used to obtain an appropriate stoichiometry for the film and to induce film formation. The temperature is taken to 250 oC, which is used to dehydrate the EtOH and supply more water to the system. For powder formation, the final temperature used is 380 oC which results in high purity, polycrystalline BT powders without barium carbonate formation. However, as previously mentioned, the physical limitations of the reactor prevented this and a final temperature of 290 oC is used. Water is a critical key to the crystallization of BT and without it, BaCO3 is formed. The optimum water to molecular titanium ratio is found to be 1536.80 This ratio is used for experiment BT1 through BT3. For experiments BT4 through BT6, the water 108PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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