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ratio is adjusted in order to determine its effects on BT film formation. Propoxide concentration is changed from the optimum value in powder formation to 0.01 in experiment BT2 to determine its effect on BT film formation. Experiment BT2 and BT3 serve as the control experiments. Experiments BT1 through BT6 did not yield BT films. Changing both the water concentration and the propxide concentration did not have any effect on the ability to deposit BT films. XPS confirms the presence of Ba, and no Ti, in all experiments, Figure 4.18, however the atomic concentration is below 1 %. Additionally, from the detection of both carbon and oxygen, as detected by XPS, Figure 4.19, both at the surface and throughout the bulk of the film, it is concluded that a trace amount of BaCO3 is formed throughout the film. Table 4.4: Table of reaction conditions for samples BT1 – BT6. Experiment BT1 0.138 BT2 0.052 BT3 0.052 BT4 0.053 BT5 0.054 BT6 0.055 Baip Ttip H2O wt. % wt. % 0.152 14.837 0.056 5.452 0.056 5.452 0.057 3.570 0.058 1.907 0.059 0.478 EtOH wt. % 84.872 94.441 94.441 96.321 97.981 99.408 Propoxide Concentration mol/(L EtOH) 0.03 0.01 0.01 0.01 0.01 0.01 H2O/Ti mol ratio 1536 1536 1536 1000 500 100 wt. % 109PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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