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4.2.4.3 Conclusions Simultaneous deposition of nickel and neodymium films (Nd in trace amounts) are deposited via the hydrogen assisted reduction of both precursors in supercritical carbon dioxide. An important aspect of the co-deposition of neodymium and nickel when using beta-diketonate organometallic precursors is the gas phase temperature. By causing the precursor to melt, dissolution rates are increased for the precursor into the supercritical carbon dioxide. Given that the precursors have a very tight range between melting and decomposition points, it is necessary to precisely control temperatures in the reactor. Given the monitored gas phase and reaction stage temperatures, the low neodymium concentration at 300 oC, and likely at 265 oC, is due to the near or surpassed decomposition temperature of the precursor. For nickel, the stage temperature of 265 oC gives a max gas phase temperature of 215 oC, which is not above the melting point of the nickel precursor. Regardless, high purity nickel is deposited and is attributed to a melting point depression from the interaction of the precursor with carbon dioxide. 118PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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