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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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substrate has yielded local increased growth rates thereby producing unconformal deposition. Ru/HfO2/Ru stacks are also studied and are shown to have a much more defined interface regardless of the additional thermal cycles. Aditionally, all three stacks are observed to have deposited conformally across the high aspect ratio features of the substrate. 4.4 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) C. Petit, S. Rusponi, H. Brune, Journal of Applied Physics 2004, 95, 4251-4260. (11) C. W. Su, F. C. Chen, Y. E. Wu, C. S. Shern, Surface Science 2002, 507, 492-497. (12) P. Hwang, B. H. Li, T. Yang, Z. H. Zhai, F. W. Zhu, Journal of University of Science and Technology Beijing 2004, 11, 319-323. References P. David, in Mechanical Engineering, Vol. Masters, Louisiana State University, 2005. D. Weller, H. Brandle, C. Chappert, Journal of Magnetism and Magnetic Materials 1993, 121, 461-470. Y. Yamada, W. P. Van Drent, E. N. Abarra, T. Suzuki, Journal of Applied Physics 1998, 83, 6527-6529. Y. Yamada, T. Suzuki, E. N. Abarra, Ieee Transactions on Magnetics 1998, 34, 343- 345. I. Zana, G. Zangari, J. W. Park, M. G. Allen, Journal of Magnetism and Magnetic Materials 2004, 272, E1775-E1776. L. Favre, V. Dupuis, E. Bernstein, P. Melinon, A. Perez, Physical Review B 2006, 74. R. J. Feng, X. H. Xu, H. S. Wu, Journal of Magnetism and Magnetic Materials 2007, 308, 131-136. M. Maret, M. C. Cadeville, A. Herr, R. Poinsot, E. Beaurepaire, S. Lefebvre, M. Bessiere, Journal of Magnetism and Magnetic Materials 1999, 191, 61-71. J. I. Park, J. Cheon, Journal of the American Chemical Society 2001, 123, 5743- 5746. 128

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