Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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designed floating pistons utilizing two o-rings for sealing. The system is appropriately outfitted with 1/16” OD taper sealing stainless steel tubing and needle valves to deliver and control flow. A metering valve is used to control the system flow just prior to the nozzle. The nozzle is a 1/16” OD piece of stainless steel tubing. Two high power density cartridge heaters (Omega Engineering Inc, Stamford, CT) are used to heat the metering valve while temperature is controlled using a custom built temperature controller consisting of a solid state relay (Omega Engineering Inc, Stamford, CT) and microprocessor-based temperature controller, model CN76000 (Omega Engineering Inc, Stamford, CT) encased in an aluminum enclosure. A Flir ThermaCam SC 3000 (Flir Systems, Boston, MA) is used for infrared imaging of samples. The camera is interfaced with a computer running ThermaCAM Researcher Pro 2.7 (Flir Systems, Boston, MA) to collect and analyze data. 5.2.2 Materials Titanium (di-isopropoxide) bis(acetylacetonate) (75 % in isopropanol) [17927-72- 9], titanium (di-isopropoxide) bis[BREW], tris(2,2,6,6-tetramethyl-3-5-heptanedionato) aluminum, Al(tmhd)3, [14319-08-5], titanium(IV) isopropoxide [546-68-9], titanium(IV) 2-ethylhexoxide [1070-10-6], zinc 2-ethylhexanoate [136-53-8] are used as received without any further purification (Strem Chemicals Inc, Newburyport, MA), Figure 5.4. Glacial acetic acid [64-19-7] (Fisher Scientific, Pittsburgh, PA) is used as received without any further purification. Coleman grade (99.99 %) carbon dioxide (Merriam Graves Corp, Charlestown, NH) is used as received. Films are deposited on silicon (crystal orientation <100>, 500 nm thermally grown oxide, 1-100 micro-ohm centimeter, 147

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