PDF Publication Title:
Text from PDF Page: 172
750 micron total thickness) (Novellus, San Jose, CA). Additionally, for electrical testing, films are deposited on square inch fluorinated tin oxide glass substrates called Tec 15 (Hartford Glass, Hartford City, IN). OO O Ti O OO O OOO O Al O O O Ti O O Zn O O OO Figure 5.4: Chemical structure of titanium (di-isopropoxide) bis(acetylacetonate), tris(2,2,6,6-tetramethyl-3-5-heptanedionato) aluminum, Al(tmhd)3, titanium(IV) 2- ethylhexoxide and zinc 2-ethylhexanoate. 5.2.3 Procedure Silicon <100> with thermally grown (500 nm) silica and Tec 15, fluorinated tin oxide glass substrates, are mounted to a stainless steel support with copper wires or bolts. The support is a stainless steel I-beam cut in half and drilled with holes used to support the substrates for deposition. The support with substrates is clamped inside of a high throughput ventilation hood. Liquid precursor and any additives are loaded into one side of a high pressure vessel with floating piston. This is done in a N2 or Ar glove box if needed. Next, supercritical carbon dioxide (T = 60 oC, P = 103 bar) is loaded from a high pressure ISCO pump into the precursor side of the high pressure vessel. The pressure vessel is not heated and the carbon dioxide returns to a liquid, although still at 103 bar. The vessel is mixed in order to create a homogeneous solution of liquid carbon dioxide dissolved into 148PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
PDF Search Title:
Supercritical Fluid Deposition Of Thin Metal FilmsOriginal File Name Searched:
Supercritical-Fluid-Deposition-Of-Thin-Metal-Films-Kinetics-Mec.pdfDIY PDF Search: Google It | Yahoo | Bing
Sulfur Deposition on Carbon Nanofibers using Supercritical CO2 Sulfur Deposition on Carbon Nanofibers using Supercritical CO2. Gamma sulfur also known as mother of pearl sulfur and nacreous sulfur... More Info
CO2 Organic Rankine Cycle Experimenter Platform The supercritical CO2 phase change system is both a heat pump and organic rankine cycle which can be used for those purposes and as a supercritical extractor for advanced subcritical and supercritical extraction technology. Uses include producing nanoparticles, precious metal CO2 extraction, lithium battery recycling, and other applications... More Info
| CONTACT TEL: 608-238-6001 Email: greg@infinityturbine.com | RSS | AMP |