Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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Figure 5.6: FE-SEM top-down (top) and cross sectional (bottom left and right) of 25 vol. % Ttip PRESS sample. A highly porous dendritic, with cylindrical macro scale, titania coating, consisting of agglomerated sub 100 nm titania crystals, is deposited. The overall film thickness varied per sample due to the number of passes with the PRESS system. Overall, film thickness ranged between 1 and 10 microns, as measured by profilometry. At 75 % precursor concentration, SEM, Figure 5.7, continues to indicate that highly porous dendritic, with cylindrical macro scale, polycrystalline rutile titania film, consisting of agglomerated sub 100 nm titania crystals, is being deposited. Finally, the control experiment of 100% precursor results in a dense film, Figure 5.8. 152

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