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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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It is observed that when no acetic acid is used, a polycrystalline titania film is deposited. Its main polymorph is rutile (Inorganic Crystal Structure Database, ICSD 01- 089-4202) with traces of anatase (ICSD 00-021-1272) and brookite (ICSD 01-075-1582), Figure 5.12. It is found that the addition of acetic acid has no significant effect on changing the main polymorph of the deposited titania film. Intensity (counts) 2500 1600 900 400 100 B <020> AR <101> <110> RRR <101> <111> <211> 25 30 35 40 45 50 55 60 65 2Theta (°) Figure 5.12: XRD comparison of samples in the acetic acid concentration study. The addition of acetic acid does not significantly alter the crystallinity of the titania film. XRD shows that the films main polymorph is rutile with traces of brookite and anatase titania. 5.3.2 Zinc Oxide 5.3.2.1 Concentration Study A concentration study of zinc 2-ethylhexonate (ZnEO) as the precursor in the PRESS system is performed in order to determine the range of concentration at which highly dedritic Zn oxide films can be created. The concentration range is 25 % by 158

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