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volume to 100 % by volume, with the remaining volume being liquid carbon dioxide (P = 103 bar, T = 60 oC). 100 % by volume of precursor is used as the control experiment. The experiments are performed at constant pressure, P = 103 bar and constant precursor concentration. The plasma torch is maintained at a constant 2” distance from the substrate surface. At low precursor concentration, 25 volume % ZnEO, no order is seen in the deposited film, Figure 5.13. As the concentration is increased to 50 volume %, Figure 5.14, the cross sectional SEM reveals that a highly porous dendritic zinc oxide nanostructure consisting of columnar assemblies of agglomerated zinc oxide particles of approximately 100 nm in size is deposited. It is observed that the cylindrical zinc oxide structures are topped with “boulders,” most likely due to annealing of the film with subsequent plasma flame passes. The control experiment of 100% precursor results in a dense film, Figure 5.15. 159PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
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