Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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5.4 Discussion The control experiments are used to validate that the PRESS process, through the use of high pressure carbon dioxide, is affecting the characteristics of the deposited metal oxide films. Dense films are observed at 100 volume % for either Ttip or ZnEO. This is also true at relatively low concentrations for both precursors. The highly dendritic structures occur in the middle of the concentrations range. This is likely due to the vapor-liquid (VL) equilibria of the two systems. Typically, when dealing with carbon dioxide and another component whose molecular size varies greatly, a “cigar” shaped VL envelope defines the phase of system in a P-x diagram.35 At both extremes of composition of the heavy component, a single phase persists throughout the range of pressure. However, between these extremes, there exists a region of two phases. When the system is initially injected with CO2 at high pressure, the system is forced into a single phase. As the solution expands across the nozzle, the two components are forced through this two phase region, resulting in increased atomization of the precursor. It is because of this quick phase change that highly dendritic films are deposited in the range of 25 to 75 volume %. The acetic acid concentration study is performed at the 25 % Ttip concentration because the change in carbon dioxide concentration, from the addition of at most 15 volume % of acetic acid, is negligible between the range of 25 % and 75 % precursor concentration since the characteristics of the deposited film are not changed in this range. It is reported that the addition of acetic acid during the formation of titania nanoparticles via a modified sol-gel process with titanium isopropoxide is used to control the hydrolysis and condensation reactions in order to achieve the titania polymorph, 165

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