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Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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anatase.36 The anatase phase of titania is the most favorable phase for photocatalysis and solar energy conversion due to its high photoactivity.37, 38 It is hoped that the addition of acetic acid to Ttip PRESS deposited films would reduce the main polymorph, rutile, and yield anatase titania, however this was not observed. It is known that at temperatures above roughly 700 oC, both anatase and brookite, another polymorph of titania, are converted to rutile. Since plasma flame temperatures are typically on the order of 1500 oC, it is likely that any control over the crystallinity is quickly lost to the extreme temperature of the plasma flame thus giving rise to consistent rutile titania results. The XPS data, Figure 5.17, for the ZnEO PRESS deposition indicate that a 1:1 ratio of Zn to O is at the surface. This is confirmed with XRD, Figure 5.16, which means that zincite (ICSD 00-036-1451) is the mineral form of the zinc oxide at the surface. It is less clear in determining the exact mineral structure of the bulk film. XPS indicates a Zn to O ratio of 2:3 in the bulk, however, Zn2O3 is a very uncommon form of zinc oxide. XRD also indicates the presence of polycrystalline ZnO2. Given the XPS and XRD data, it is concluded that both ZnO and ZnO2 are in a 1:1 ratio throughout the bulk of the film. 5.5 Conclusions A new process that uses both plasma spray technology and the rapid expansion of supercritical solutions is combined to form a brand new process that is called plasma- enhanced rapid expansion of supercritical solutions, labeled PRESS. The PRESS process is used to deposit a variety of metal oxides, specifically, titanium oxide and zinc oxide. Ttip is used in the PRESS system to deposit highly porous dendritic, with cylindrical macro scale, polycrystalline rutile titania films, consisting of agglomerated sub 100 nm 166

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