PDF Publication Title:
Text from PDF Page: 194
6.1 Conclusions CHAPTER 6 CONCLUSIONS AND FUTURE WORK The main goal of this work is take the supercritical fluid deposition technique from a demonstrated technology to a point where it is a viable option for the miniaturization of microelectronic devices in industry. Other technologies are identified to overcome certain aspects of the entire miniaturization challenge, from a top-down method, as a whole, however none can fully satisfy all the needs for industrial integration. From conformal coverage over large surface areas in complex geometries to industry scale cost-effective solutions for depositing thin films, supercritical fluid deposition technology can meet these challenges. 6.1.1 Kinetics The challenge of industrial acceptance of SFD technology is first approached from the scale-up demands. An in depth study to understand the chemistry behind the deposition of thin films in supercritical fluid technology is undertaken. The kinetics of ruthenium thin film deposition by supercritical fluids using bis(2,2,6,6-tetramethyl-heptane-3,5-dionato)(1,5-cyclooctadiene)ruthenium(II) as the precursor is studied. Reaction rate orders are determined and a Langmuir – Hinshelwood deposition mechanism is proposed. The apparent activation energy is found to be 45.3 kJ/mol over the temperature range of 240 °C to 280 °C. A study on the growth rate dependence of precursor concentration indicates a first order reaction rate order for concentrations less than 0.06 wt. % and zero order for concentrations higher than 0.06 wt. 170PDF Image | Supercritical Fluid Deposition Of Thin Metal Films
PDF Search Title:
Supercritical Fluid Deposition Of Thin Metal FilmsOriginal File Name Searched:
Supercritical-Fluid-Deposition-Of-Thin-Metal-Films-Kinetics-Mec.pdfDIY PDF Search: Google It | Yahoo | Bing
Sulfur Deposition on Carbon Nanofibers using Supercritical CO2 Sulfur Deposition on Carbon Nanofibers using Supercritical CO2. Gamma sulfur also known as mother of pearl sulfur and nacreous sulfur... More Info
CO2 Organic Rankine Cycle Experimenter Platform The supercritical CO2 phase change system is both a heat pump and organic rankine cycle which can be used for those purposes and as a supercritical extractor for advanced subcritical and supercritical extraction technology. Uses include producing nanoparticles, precious metal CO2 extraction, lithium battery recycling, and other applications... More Info
| CONTACT TEL: 608-238-6001 Email: greg@infinityturbine.com | RSS | AMP |