Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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to analyze the crystal structure of the deposited film and the desirable alloying of cobalt and platinum is not observed. 6.1.3.2 Ceria/Platinum The catalytically enhanced deposition of polycrystalline ceria (+3 state) and polycrystalline platinum from Ce(tmhd)4 and Pt(Me)2cod, respectively, is discovered. This low temperature co-deposition is extended towards fuel cell applications, specifically, fabrication of methanol oxidation fuel cell electrodes. The resultant electrodes are shown to be catalytically active. 6.1.3.3 Barium Titanate The deposition of barium titanate, BaTiO3, as a high k dielectric material for high density energy storage applications is studied. Recently, a method for the single step synthesis of BaTiO3 powders was identified. The method is modified and applied to the deposition of a thick dense film from a supercritical ethanol/water solution. Two important aspects of this reaction are studied in order to evaluate the ability to induce BaTiO3 film formation in this new process. First, the water ratio, which controls BaTiO3 crystallinity is tested and no film formation is detected. Next, the propoxide concentration, used in precursor synthesis, is evaluated and is found to have no affect on the ability to deposit high purity polycrystalline BaTiO3 films. Given the experimental findings and the high BaCo3 concentrations deposited on the films, it is proposed that the high purity polycrystalline BaTiO3 did not form due to equipment limitations in reaching the desired reaction temperature of 380 oC, which is responsible for BaTiO3 crystallinity. 173

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