Supercritical Fluid Deposition Of Thin Metal Films

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Supercritical Fluid Deposition Of Thin Metal Films ( supercritical-fluid-deposition-of-thin-metal-films )

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6.1.3.4 Neodymium/Nickel In the area of solid oxide fuel cells, there exists a need to decrease the operating temperature. With this need comes the opportunity to find cheaper materials for electrode fabrication. Neodymium and nickel have been identified as candidates for high performance and low temperature solid oxide fuel cell cathodes Simultaneous deposition of nickel and neodymium, in trace amounts, films are deposited by the hydrogen assisted reduction of both precursors via SFD. An important aspect of the co-deposition of neodymium and nickel when using beta-diketonate organometallic precursors is the gas phase temperature. By causing the precursor to melt, dissolution rates are increased for the precursor into the supercritical carbon dioxide. Given that the precursors have a very tight range between melting and decomposition points, it is necessary to precisely control temperatures in the reactor. Given the monitored gas phase and reaction stage temperatures, the low neodymium concentration is proposed to be a function of the near or surpassed decomposition temperature of the precursor. Additionally, the high purity nickel that is deposited is attributed to a melting point depression from the interaction of the precursor with the carbon dioxide. 6.1.3.5 Stacks via Layered Deposition The ability to deposit conformal layers is being extended to the fabrication of devices by layer-by-layer deposition, which is no more complex than a simple deposition repeated numerous times to achieve the intended result. For demonstration of this technique, thin film capacitors are fabricated from three consecutive supercritical fluid depositions. 174

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