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PowerMEMS 2013 IOP Publishing Journal of Physics: Conference Series 476 (2013) 012079 doi:10.1088/1742-6596/476/1/012079 Figure 6. Schematic of the experimental setup. Figure 7. Estimated temperature of BaTiO3 capacitor versus elapsed time. Figure 8. Output voltage versus elapsed time. the permittivity is drastically changed. Figure 5 shows the DC permittivity of the BaTiO3 capacitor versus the temperature. Due to additives into the present BaTiO3, α is not so high and about 0.5. An electret plate is fabricated using a 4 cm square Si substrate with 1.5 μm-thick thermally-grown SiO2. After corona charging, the surface potential is 420 V, which corresponds to the surface charge density σe of 9.5 mC/m2. The metalized electret is formed by stacking another Si substrate with 1.5 μm-thick SiO2 onto the electret plate. In the preliminary experiment with the present BaTiO3 and electret plates, C0*=0.2, which is far from the optimum design. Figure 6 shows the experimental setup. The BaTiO3 capacitor is sandwiched with copper plates and heated on a hot plate. Temperature of the copper plates is measured with thermocouples, and the BaTiO3 temperature is estimated using one-dimensional heat conduction equation with contact 4PDF Image | Electrostatic Thermal Energy Harvester Using Unsteady Temperature Change
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