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PowerMEMS 2013 IOP Publishing Journal of Physics: Conference Series 476 (2013) 012079 doi:10.1088/1742-6596/476/1/012079 resistance. Figure 7 shows the measured temperature of the top/bottom copper plates and the estimated temperature of the BaTiO3 capacitor, which is increased from 20 to 100 oC in about 300 s. Figure 8 shows the output voltage across a 1 GΩ resistive load. Up to 0.6 V is obtained, corresponding to about 30 nJ in 300 s. Although amount of the generated power in this early prototype is limited, the results are in accordance with prediction of the circuit model. Thus, the output power can be much increased by using the optimum C0*, much higher α, and higher surface potential with CYTOP electrets [13, 14]. It is also noted that the Currie temperature of Zr-added BaTiO3 could be as low as 60 oC, and α can be as large as 5. 4. CONCLUSION A new electret thermal generator using temporal temperature change has been proposed. A simplified circuit model is developed for parameter optimization. It is found that the optimum capacitance ratio is around unity and the output power is significantly increased with the capacitance increase rate. A preliminary experiment using BaTiO3 ceramic as the dielectric layer is carried out. It is demonstrated that the experimental data are well predicted with the present model. This work is partially supported through JSPS NEXT Program. Photo masks are made using F5112+VD01 EB writer at VDEC of the University of Tokyo. References [1] V. Leonov, and R. J. M. Vullers, 2009, Wearable electronics self-powered by using human body heat: The state of the art and the perspective, J. Renew. Sust. Energ., Vol. 1, 062701. [2] M. Lossec et al., 2010, Thermoelectric generator placed on the human body: System modelling and energy conversion improvements, Eur. Phys. J. Appl. Phys., Vol. 52, 11103. [3] Z. Wang et al., 2009, Characterization and optimization of polycrystalline Si70%Ge30% for surface micromacined thermopiles in human body applications, J. Micromech. Microeng., Vol. 19, 094011. [4] J. Xie et al., 2010, Design, fabrication, and characterization of CMOS MEMS-based thermoelectric power generators, J. Microelectromech. Syste., Vol. 19, 317-324. [5] A. Moser et al., 2012, Thermoelectric energy harvesting from transient ambient temperature gradients, J. Electr. Mater., Vol. 41, 1653-1661. [6] N. Bailly et al., 2008, Energy scavenging based on transient thermal gradients: Application to structual health monitoring of aircraft, PowerMEMS2008, Sendai, 205-208 [7] D. Samson et al., 2012, Flight test results of a thermoelectric energy harvester for aircraft, J. Electr. Mater., Vol. 41, 1134-1137. [8] M. E. Kiziroglou et al., 2014, Design and Fabrication of heat storage thermoelectric harvesting device, IEEE Trans. IE-61, 302-309. [9] G. Sebald et al., 2009, On thermoelectric and pyroelectric energy harvesting, Smart Mater. Struct. Vol. 18, 125006. [10] S. K. T. Ravindran et al., 2011, A self-sustaining micro thermomechanic-pyroelectric generator, Appl. Phys. Lett., Vol. 99, 104102. [11] H. Nguyen et al., 2010, Pyroelectric energy converter using co-polymer P(VDF-TrFE) and Olsen cycle for waste heat energy harvesting, Appl. Therm. Eng., Vol. 30, 2127-2137. [12] J. Xie et al., 2010, Performance of thin piezoelectric materials for pyroelectric energy harvesting, J. Intell. Mater. Syst. Struct., Vol. 21, 243-249. [13] Y. Sakane et al., 2008 The development of a high-performance perfluorinated polymer electret and its application to micro power generation, J. Micromech. Microeng., Vol. 18, 104011. [14] K. Kashiwagi et al., 2011, Nano-cluster-enhanced high-performance perfluoro-polymer electrets for energy harvesting, J. Micromech. Microeng., Vol. 21, 125016. 5PDF Image | Electrostatic Thermal Energy Harvester Using Unsteady Temperature Change
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