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CARBON DIOXIDE TECHNOLOGY PLATFORM 127 Figure 9 Liquid CO2 spin coating appartus. the unique purpose of deposition from a novel liquid CO2 spin-coating device. Such a device has been constructed, as shown in Figure 9. The high pressure spin coating apparatus consists of a top-loading high pressure vessel with a magnetic drive unit extending through the bottom of the chamber. The drive shaft is connected to a rotating chuck upon which the substrates are placed. The chuck may be rotated at speeds up to 2500 rpm. CO2 is pumped into the vessel until the overall pressure is just below the vapor pressure of CO2. The photoresist polymer is added to a second pump, where it is dissolved in liquid carbon dioxide. Uniform film thickness will result if CO2 is evaporated at a rate that allows moderate changes in the liquid viscosity. Potential candidates for 193-nm negative resist and positive e-beam resist sys- tems are shown in Figure 10. The photoresists are based on copolymers of fluo- roalkyl methacrylates, which yield glassy polymers that are soluble in CO2 between 0–20◦C at vapor pressure (9). Tert-butyl methacrylate is a common component in photoresists, as the t-butyl group is readily removed by photoacid generators to produce the methylacrylic acid (MAA). 3.1.2 Free Meniscus Coatings Free meniscus coating (FMC) is yet another area that could be impacted by a more environmentally responsible solvent such as CO2.PDF Image | OPPORTUNITIES FOR POLLUTION PREVENTION
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IT XR Project Redstone NFT Available for Sale: NFT for high tech turbine design with one part 3D printed counter-rotating energy turbine. Be part of the future with this NFT. Can be bought and sold but only one design NFT exists. Royalties go to the developer (Infinity) to keep enhancing design and applications... More Info
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