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1 SURVEY OF CHEMICAL EMISSIONS Table 66. Detailed Breakdown of CH4 and N2O Emissions from Manure Management Gas/Animal Type 1990 2001 CH4 31.3 38.9 Dairy Cattle 11.4 15.1 Beef Cattle 3.4 3.3 Swine 13.1 17.1 Sheep 0.1 - Goats - - Poultry 2.7 2.7 Horses 0.6 0.6 Total 77.7 (206 PJ) 59.3 (157 PJ) N2O 16.2 18.0 Dairy Cattle 4.3 3.9 Beef Cattle 4.9 6.1 Swine 0.4 0.4 Sheep - - Goats - - Poultry 6.3 7.3 Horses 0.2 0.2 U.S. Environmental Protection Agency. U.S. Inventory of Greenhouse Gases. Washington: Government Printing Office. April 15, 2003. All values reported in Tg CO2 Eq = Teragrams of Carbon Dioxide equivalent. Electronics Industry Process exhaust systems are critical to microelectronic and semiconductor manufacturing facilities. Exhaust flow rates and compositions from the different microelectronics manufacturing processes vary. Effectively managing process exhaust to minimize emissions requires accurate knowledge of the quantities of each segregated exhaust, a characterization of the emissions, and an understanding of the constituents’ physical and chemical properties. Due to the fact that conversion of reactants fed to tools is typically low, the majority of emissions are feed gases. Table 67 lists typical processes and resulting emissions from a small electronics facility. 61PDF Image | Analysis for Recovering Energy from Industrial Waste Heat
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