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Assuming that νstoc >> ω, the anomalous skin depth is given by C e c 2 v ̄ e 1 / 3 δe = 2ωω2 (3.27) pe where c is the speed of light and wpe is the plasma frequency. The helicon plasma is the third operating mode of RF discharges. This is a wave-heated plasma that is sustained by an EM wave and an external magnetic field. RF frequencies range from 1 - 50 MHz with magnetic fields on the order of a few hundred Gauss. Similar to the inductive coil configuration of an ICP, the helicon wave is excited by an RF antenna that typically surrounds a cylindrical dielectric plasma-containing vessel. Electromagnets surround the antenna and the plasma tube, forming a uniform DC magnetic field along the plasma column. These discharges are able to achieve high electron densities up to 1014 cm−3 [61]. The RF antenna excites the transverse mode structure, resulting in a superposition of low-frequency whistler waves propagating at a fixed angle to the external B⃗ field. The antenna will couple to transverse electric or magnetic fields to excite a specific mode. Energy transferred to electrons takes place via wave-particle interaction. In collisional damping, the helicon mode propagates along the plasma column and energy is transferred to the bulk electron population from Ohmic heating. However in collisionless Landau damping, the wave transfers energy to electrons that have velocities near the wave phase velocity vph = ω/kz, where kz is the axial component of the wave vector [61]. Landau damping can result in a non-equilibrium electron population in which a portion of the electrons have energies much higher than the bulk electron temperature. Other mechanisms have been cited as possibly contributing to electron heating, such as electron trapping in large amplitude helicon waves or excitation of Trivelpiece-Gould modes. However, it is clear that Ohmic heating alone cannot account for the electron energies in low pressure helicon discharges. 46PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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