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Surface wave discharges excited by microwaves are another type of plasma that utilizes wave-particle interactions for energy transfer. Surface waves are defined as waves that only propagate near the surface of the plasma and can be launched in a range of frequencies, typically in the microwave regime from 1 - 10 GHz. When operating microwave plasmas, the EM waves will usually propagate through rectangular waveguides until striking the plasma. The wave propagation inside a waveguide can be described using Maxwell’s equations assuming an EM field sinusoidal time dependence of e−iωt: ∇ × E = iωB (3.28a) ∇ × B = −iμεωE (3.28b) ∇·E=0 (3.28c) ∇·B=0 (3.28d) Three different types of wave propagation modes may be excited for microwave propagation. The transverse electromagnetic (TEM) waves have no electric or magnetic field in the direction of propagation. Thus in polar coordinate notation, Bz = Ez = 0. The transverse magnetic (TM) waves have an electric field but no magnetic field in the direction of propagation (Bz = 0, Ez ̸= 0). The transverse electric (TE) waves are the opposite of TM, with a magnetic field but no electric field in the direction of propagation (Bz ̸= 0, Ez = 0). The transverse electric and magnetic fields derived from (3.28) for the TM and TE waves, respectively, are given below [50]: Et =±ik∇tψ γ2 Bt =±ik∇tψ γ2 (3.29a) (3.29b) 47PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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