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pump for chamber evacuation, reaching a base pressure of less than 3 mtorr. The RF plasma source is mounted on the side of the chamber on a port measuring 15 cm in diameter. Gas is injected into the chamber via a 15-cm-diameter by 50-cm-long quartz tube vacuum sealed to the side of the chamber by a rubber O-ring. The helicon plasma source consists of a 13.56-MHz, 1-kW RF power supply connected to a double helix antenna via a pi-style matching network. The matching network reduces the reflected power to about 1% or less during operation. The antenna is wrapped around the quartz gas injection tube and is surrounded by three EM coils that provide an external peak magnetic field of 415 G along the centerline [71]. The electromagnetic coils are powered by a Lambda DC power supply capable of outputting a maximum current of 60 A. While electron density and electron temperature measurements were not taken during these tests, previous experiments performed in CTF under similar operating conditions near 300 mtorr have found that the electron density is about 109 − 1011 cm−3 and electron temperature is typically in the range of 2-4 eV [70]. An illustration of the experimental setup is shown in Figure 4.1. 4.2.2 Diagnostics A Stanford Research Systems RGA100 residual gas analyzer (RGA) is used in all experiments to identify the species present in the system. The maximum allowable operating pressure of the RGA is 10−4 torr, which is much lower than the plasma discharge operating regime of 50-300 mtorr. To accommodate the pressure requirements of the RGA, a differentially pumped subchamber is attached to the top of CTF in which the RGA is housed, reaching a base pressure of 10−9 torr. A variable leak valve is used to isolate the subchamber from the main plasma facility, while the subchamber is evacuated by a Varian V70LP turbomolecular pump backed by an Edwards E2M30 mechanical pump. A diagram of the RGA subchamber and its attachment to the 67PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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