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Figure 4.2: Diagram of RGA chamber [70]. of partial pressures can be plotted vs. the ratio of flow rates for CO2, CO, and O2 and a linear relationship should be found. The slope of the line represents CF, as demonstrated in Figure 4.3a. A sample spectrum of the raw data taken by the RGA is shown in Figure 4.3b to demonstrate that CO2, CO, and O2 are the main species present in the discharge. For all RGA data presented here, results shown are the mean values of a sample of measurements. Error bars represent one standard deviation among the spread in the measurement sample. The sample size for the calibration data is three sets with three spectra for each data point. The sample size for the CO2 plasma species measurements is two sets of data with three spectra for each data point. 4.3 Results To determine the optimal operating conditions for CO2 dissociation in the RF discharge, three parameters were varied: flow rate of CO2, RF power, and magnetic field strength. All results are presented for the combined CO2/Ar plasma in which the 69PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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