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(a) (b) Figure 4.3: RGA data collection: a) calibration factor curve, b) sample RGA spectrum demonstrating CO2, CO, and O2 as the main products. flow rate of Ar remained constant at 10 standard cubic centimeter per minute (sccm) while the flow rate of CO2 varied from 15 sccm up to 100 sccm. The flow rate of CO2 was confined to 100 sccm to maintain a stable discharge. As the total flow rate increased, the pressure also increased inside the chamber and the discharge could not be sustained at powers under 700 W with CO2 as the dominant input gas species. The total flow rate range corresponds to an operating pressure range of 80 to 280 mtorr in CTF. For this set of experiments we were concerned with characterizing the efficiency of CO2 dissociation with CO2 as the majority gas in the system. The addition of Ar was solely used as a calibration gas and thus the flow rate of Ar remained constant throughout all tests. By increasing the ratio of Ar/CO2, it is possible that more RF power would go into ionizing Ar, which is undesirable since we prefer all power to go into CO2 dissociation to achieve high energy efficiency. RF power was manually set to 0, 250, 500, 750, and 1000 W in random order, and the applied DC current for the magnetic coils was set to 0, 30, and 60 A for each flow rate. The resulting maximum 70PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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