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axial magnetic fields at these currents are 0, 207, 415 G. The RGA identifies gas species present in the plasma by ionizing gas molecules inside the RGA head and separating the species according to the mass/charge ratio. Given that the atomic masses of CO and N2 are 28.0101 amu and 28.0134 amu respectively, the RGA is not capable of distinguishing between singly-ionized CO and singly-ionized N2. To eliminate this ambiguity, a preliminary background scan was taken before any CO2 flowed into the chamber. Assuming that there are no significant leaks in the vacuum system (a good assumption given the low base pressure), the partial pressure of N2 should not increase with the introduction of CO2. By subtracting the background scan from all subsequent scans, any resulting partial pressure measurements at the mass/charge ratio of 28 can be taken to correspond to singly-ionized CO. Figure 4.4 displays the results of the flow rate of species created in the plasma as a function of power with no external magnetic field applied. The input flow rates are shown for 15 sccm and 100 sccm of CO2 with 10 sccm of Ar. The decline of the CO2 flow rate is evident in all cases as well as the rise in CO and O2 flow rates, indicating dissociation has occurred. (a) (b) Figure 4.4: Output plasma species flow rate with B⃗ = 0: a) 15 sccm input CO2 flow rate, and b) 100 sccm input CO2 flow rate. 71PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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