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chamber is needed to accommodate the low-pressure requirements of the RGA. Thus the same four-port subchamber is used in this experiment as shown in Figure 4.2, evacuated by the turbomolecular pump attached to one port, the RGA on another port, and an ion gauge for pressure measurement on the third port. Unlike the previous configuration, the fourth port attaches to a capillary column instead of a vacuum chamber. A 0.102-mm ID fused silica capillary column 2 m in length is used to sample gas flowing out of the plasma exhaust. One end of the capillary column is at atmospheric pressure and is inserted into the exhaust end of the discharge tube for plasma species measurement. The low-pressure end of the column is attached to the RGA chamber. The length and ID of this capillary are sufficient to maintain a pressure of 6×10−5 torr inside the RGA chamber, while remaining open to atmospheric pressure at one end. For RGA data analysis, the same empirical formula, Equation 4.1, is used to gain quantitative information from RGA partial pressure readings. Given the operating conditions have changed to atmospheric pressure, with much higher flow rates of Ar and CO2 (on the order of 1000’s of sccm instead of 10’s of sccm), new calibration curves were formed. The resulting curves are shown in Figure 5.11, where the curves for each gas are of noticeably different lengths because different flow rate ranges were used for each species with constant Ar flow rate of 8 slm. As in the error analysis described in Section 4.2.2, all RGA results presented here are the mean values of a sample of measurements. Error bars represent one standard deviation among the spread in the measurement sample. The sample size for the calibration data is four sets with three spectra for each data point, unlike the three data sets used previously. The sample size for the CO2 plasma species measurements is two sets of data with three spectra for each data point, as before. 93PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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