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the dominant peak corresponding to singly ionized Ar, with a smaller peak at 20 for doubly ionized Ar. The other peaks found in the air spectrum become insignificant. The RGA spectrum changes once more when CO2 is added, as shown in Figure 6.5. This spectrum is the result of adding 4 slm of CO2 to the existing 8 slm of Ar, with 1.5 kW of MW power applied. Given the high flow rate of Ar, 40 remains the highest peak in the spectrum, followed by CO2 at 44. There are smaller peaks for singly ionized species at 12, 16, 28, and 32 for C, O, CO, and O2, respectively. Doubly ionized Ar is also still present at 20. Figure 6.4: RGA background scans for air and Ar 6.1.2.1 Effects of Flow Rate and Power As expected, increased MW input power leads to increased production of CO and O2, demonstrated in Figure 6.6. Here the output flow rates of CO and O2 as determined from MS data are plotted as a function of power for two different CO2 input flow rates: 4 slm and 1 slm. For both species there is a steady increase in flow rate as power increases to 1.75 kW. There is also an increase in flow rate as the input 112PDF Image | CO2 Conversion in a Microwave Plasma Catalyst System
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