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3.3. RESULTS 3. PROPERTIES OF MICRO-DISCHARGES Std Dev 200 mbar 400 mbar 600 mbar 800 mbar 5 4 3 2 1 0.2 0.4 0.6 0.8 Pavg (W) 1 1.2 1.4 Figure 3.9: Plot showing the filaments per half cycle as a function of power at different pressures. The background shading is to represent the standard deviation in the measurement. Dashed lines at Navg = 1, 2 and 3 are drawn for reference. Φ= 700 sccm difficult to generate new filaments i.e the power required to generate additional filaments is increasing – a form of power-law relation similar to equation 3.4 with exponent less than 1 (0.3 to be precise). The standard deviation shown in figure 3.9 is an average of standard deviation from 5 different sets of 20 HCs each. The standard deviation shown in figure 3.9 increases with increase in filaments because, power injection becomes in- creasingly unstable. Those conditions for which Navg is not a whole number can be explained from the fact that there is a distribution in filaments with some half cycles having slightly different number of filaments than Navg. For example, a Navg of 2.5 indicates that half of the HCs have 2 filaments and the other half 3. A typical histogram that shows distribution in filaments over different HCs is shown in figure 3.10. In this figure number of HCs with exactly one filament, number of HCs with exactly two filaments and so on is plotted at different flows at one constant pressure and voltage (consequently constant Pavg) and at different flows. The distribution shows that at this condition majority of HCs have two filaments with few HCs having one filament. It also shows the independence of Navg with flow. 55 NavgPDF Image | Understanding CO2 containing non-equilibrium plasmas
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