Investigation of metal-insulator transition in magnetron sputtered samarium nickelate thin films

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Investigation of metal-insulator transition in magnetron sputtered samarium nickelate thin films ( investigation-metal-insulator-transition-magnetron-sputtered )

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List of Tables 1.1 Bond lengths of RE-O bonds in rare earth oxides, given in nm. ∗ - trivalent monoxides, + - intermediate valent oxides. As presented in(23).................................. 3 1.2 Ionic radii of trivalent RE ions, given in nm. As presented in (23). 4 1.3 Sintering conditions, delta, TM I , lattice parameters and Ni-O-Ni bond angles for various NdNiO3−δ. As presented in (91). . . . . . 12 3.1 Details of magnetron sputtering process of SmNiO3 thin films. Two groups of samples were deposited either in mixed argon and oxygen atmosphere or pure argon. For each atmosphere the deposition time was varied. Also, one sample from each group was not annealed - that is S-30AOn and S-42An. (*) additional cleaning in ultrasonic cleaner in methanol, (+) minor instability of incident power, (-) gauge off. Sample code name includes information about the sput- tering time value in minutes, type of plasma composition (A/AO) and the presence (w) or absence (n) of subsequent post-annealing. 62 3.2 Details of annealing process of SmNiO3 thin films. Three sessions of annealing procedure were held. (*) 2 min O2 spraying in pressure reactor, additional cleaning in ultrasonic cleaner in ethanol for 15 min. (**) initial 4h 15min sample spent at 295 K and 68 bar O2 with no heating. Sample code name includes information about the sputtering time value in minutes, type of plasma composition (A/AO) and the presence (w) or absence (n) of subsequent post- annealing................................ 63 xvii

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